In the women's draw, Dominika Cibulkova lost 6-4, 6-4 to Garbine Muguruza and Simona Halep beat Lesia Tsurenko 6-3, 6-1 to set up a semifinal with third-seeded Carla Suarez Navarro, who rallied to beat Tsvetana Pironkova 2-6, 6-4, 6-4.
Wawrinka looked untroubled on his way to winning the first set, but immediately lost his service in the first game of the second before Chardy reeled off three straight service games to love to reach 5-3.
Wawrinka then broke back and won the tie break. He plays Guillermo Garcia-Lopez in Friday's semifinals after the Spaniard beat Jan Hernych 6-4, 6-1.
Results from day five of the 's-Hertogenbosch ATP/WTA (x denotes seeding):
Quarter finals:
Men:
Nicolas Mahut (FRA) bt Yevgeny Donskoy (RUS) 6-3, 7-6 (7/1)
Guillermo Garca-Lopez (ESP) bt Jan Hernych (CZE) 6-4, 6-1
Stanislas Wawrinka (SUI x2) bt Jeremy Chardy (FRA x5) 6-4, 7-6 (7/2)
Women:
Simona Halep (ROM) bt Lesya Tsurenko (UKR) 6-3, 6-1
Carla Suarez (ESP x3) bt Tsvetana Pironkova (BUL) 2-6, 6-4, 6-4
Garbie Muguruza (ESP) bt Dominika Cibulkova (SVK x2) 6-4, 6-4